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Edwards STP turbomolecular pumps. Sales And Service. in Buffalo, New York For Sale

Type: Business, For Sale - Private.

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VACUUM PUMP PRICES
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VACUUM PUMP PRICES
Edwards STP magnetically levitated turbomolecular pumps
Designed by continuous improvement on existing proven reliable technology
Advanced materials and designs provide:
Class leading performance
Low vibration
Guaranteed reliability
Low cost of ownership
The broad product range covers all potential turbo pump applications.
ualified by all major semiconductor OEM?s
Used in all major semiconductor fabrication plants
Installed base of over xxxx0 units, 85% in the semiconductor industry
Edwards STP magnetically levitated turbomolecular pumps - Key features
Multi-axis magnetic bearing system
High Throughput versions for high flow processes
Low vibration characteristics
Advanced controller technology
Full interfacing capability
Edwards STP magnetically levitated turbomolecular pumps - Features & benefits
Improved pumping performance
Optimized for semiconductor process pressures
Maximized gas throughput for each flange size
Applications specific models
New generation universal controllers
Compact (1/2 rack) controller
Auto tune enabling "mix and match" pumps
Integrated TMS control
Improved diagnostics
High power d.c. motor drive
Fast ramp-up time
Self regeneration upon
Edwards is a leader in clean and dry vacuum technology. The first STP pumps were sold in xxxx and there are now over xxxx0 installations worldwide. 85% are operating on semiconductor process tools where they demonstrate exceptional levels of reliability. STP pumps are the first choice for applications demanding high up-time, hydrocarbon-free pumping, minimal maintenance and low vibration.
Proven reliability.
Clean oil-free high vacuum.
Complete range from 300 to xxxx l s-1.
Application specific models.
Very low noise and vibration.
Low cost of ownership.
Virtually maintenance free.
Installation in any orientation.
Full remote control interface.
Supported globally by Edwards
Proven magnetic bearing technology
The rotor is entirely suspended by magnetic bearings so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing wear and no requirement for consequent pump maintenance.
Edwards STP range
Edwards UHV series
The Ultra High Vacuum series of magnetically levitated turbo molecular pumps are the products of choice for the semiconductor, surface science or high energy physics industries. They offer unrivalled reliability, performance, cleanliness and class leading low vibration levels. The pumps are all d.c. powered, eliminating the need for batteries, they use a half rack controller which features auto-tuning and advanced diagnostic features. The range contains pumps with speeds from 300 l s-1 to xxxx l s-1 all of which are available in ISO or CF flange variants.
Edwards High throughput series
The high throughput series of magnetically levitated turbo pumps generate the high gas flows required by the current generation of semiconductor etch, ion implant and LCD systems. All the pumps feature a five active axis magnetic bearing system and a d.c. drive for increased robustness and stability. They use a Holweck stage to provide advanced throughput performance. They operate via a half rack controller with auto-tuning, advanced diagnostics and an integrated temperature management system The range operates with throughput speeds from 300 l s-1 to xxxx l s-1.
Edwards Advantage series
The new Advantage series of magnetically levitated turbo pumps have been designed to provide the highest levels of throughput required by the next generation of semiconductor etch and CVD processes. They have been developed, using continuous improvement techniques, from the ultra reliable, high performance H series of products. Their advanced rotor design combined with selection of the best materials has allowed the creation of the next generation of high throughput turbo pump inside the same footprint as many of the existing models. The range contains pumps with throughput speeds from 800 l s-1 to xxxx l s-1.
Edwards STP features
Edwards Oil free
All STP turbomolecular pumps are oil free. The use of magnetic bearings eliminates all hydrocarbon lubricants ensuring no contamination of the vacuum process from the turbomolecular pump. This feature is vital in the semiconductor industry (where device densities are constantly increasing) and in surface science or high energy physics applications (where even minute degrees of contamination disrupt measurements).
Maintenance free
Unlike conventional mechanical bearings, magnetic levitation means there is no frictional contact, eliminating sources of wear and vibration. This feature enables STP turbomolecular pumps to run for years with virtually no maintenance, reducing annual operating costs to a minimum and ensuring maximum up-time is achieved. This maintenance free feature can be particularly beneficial on processes producing chemical or radioactive contamination.
Vibration free
Magnetic levitation of the rotor results in an extremely low level of noise and vibration. Peak-to-peak vibration level is less than 0.02 ?m. This amplitude remains constant throughout the life of the pump and is free from troublesome sub-harmonics.
Vibration analysis STP300 displacement/frequency
Automatic balancing system (ABS)
ABS is a unique patented
development of 5-axis technology. If any rotor imbalance is introduced (by deposition of process by-products, for example), sensors in the pump detect changes in the rotor motion and compensate the magnetic bearing fields to allow the rotor to spin on its natural inertial axis. This minimizes the vibration transmitted to the inlet flange. ABS works at all pump rotational speeds.
Safety backup bearings
STP pumps have dry lubricated axial and radial mechanical bearings as safety backup bearings. These support the rotor and protect the pump in the event of a total disruption of magnetic suspension or a massive air inrush which overcomes the magnetic bearing stiffness. These high precision ball bearings are dry lubricated and are not in contact with the rotor during normal operation.
Optimized rotors
The multistage pure bladed rotors in the UHV pumps provide the high vacuums required for clear beamlines on CD SEM machines, mass spectrometers and ion implanters. They provide optimum pumping performance with excellent light gas compression ratios.
Compound rotors
The high throughput pumps incorporate a Holweck drag stage that increases the pumps throughput at low pressure.
Advanced series compound rotors
The advanced series
pumps have a redesigned compound rotor, the materials of manufacture have been improved to reduce the clearances within the pump, the rotors have an advanced 3D design and the Holweck stage has been redesigned to increase the throughput.
Corrosion resistant
To ensure a high level of resistance to corrosion, the corrosion resistant (C) and high throughput (H-C) pumps have nickel coated rotors/stators and pump internals suitable for ion implantation and plasma etching. Further enhanced levels of protection are available on request.
Nitrogen purging
The corrosion resistant (C) pumps and the high throughput (H-C) pumps have a nitrogen purge facility, a constant flow of nitrogen through the pump dilutes corrosive gases minimizing their damage to the pumps motor and sensor coils.
TMS system
The Edwards Temperature Management System is available on a wide range of turbo pumps. It is designed to optimize the temperature within the pump, dramatically reducing the particle condensation within. This will not only considerably enhance the performance of the pump under harsh process conditions, but also increase its operational life.
Edwards STP magnetically levitated turbomolecular pumps - Applications
Semiconductor fabrication
STP turbomolecular pumps are the number one choice for the world?s leading semiconductor etch and implant manufacturers. The pumps are installed on the harshest applications (for example, metal etch) and demonstrate exceptional levels of reliability.
Plasma etch (chlorine, fluorine and bromine chemistries) for metal (aluminum), tungsten and dielectric (oxide) and polysilicon
Electron cyclotron resonance (ECR) etch
Film deposition CVD, PECVD, ECRCVD, MOCVD
Sputtering
Ion implantation source, beam line pumping end station
MBE
Diffusion
Photo resist stripping
Crystal/epitaxial growth
Wafer inspection
Load lock chambers
Scientific applications
STP pumps are used extensively in the world?s foremost research and development institutes. The pumps satisfy stringent performance criteria and reliability expectations. They are also used in the following applications:
Scientific instruments: surface analysis, mass spectrometry, electron microscopy
High energy physics: beam lines, accelerators
Radioactive applications: fusion systems, cyclotrons
Data summary - Edwards STP magnetically levitated turbomolecular pumps
Edwards STP-XAxxxxC turbomolecular pump
STP-XAxxxxC turbomolecular pump
Pumping speed l s-1:
N2: xxxx/xxxx/xxxx
H2: xxxx
Inlet flange: VG300/ISO320F/VG350
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 10-7 (10-9) order
CF (not C version):
CF (C version only):
Rated speed: 24,000
Control unit:
Edwards STP-iX455 turbomolecular pump
STP-iX455 turbomolecular pump
Pumping speed l s-1:
N2: 300/450
H2: 300/460
Inlet flange:ISO100K/DN100CF/ISO160K/DNxxxxCF
Ultimate pressure with bake
out heating Pa (Torr):
ISO:10-8 DN Flange
CF (not C version):10-6 ISO Flange
CF (C version only):
Rated speed:
Control unit:
Edwards STP301 - STP301C turbomolecular pump
STP301/STP301C turbomolecular pump
Pumping speed l s-1:
N2: 300
H2:300
Inlet flange:ISO100/DN100CF
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 6.5 x 10-6 (5 x 10-8)
CF (not C version):10-8 (10-10) order
CF (C version only): 10-7 (10-9) order
Rated speed: 48,000
Control unit: SCU-301/451
Edwards STP-L301 - STP-L301C turbomolecular pump
STP-L301/STP-L301C turbomolecular pump
Pumping speed l s-1:
N2: 260
H2: 290
Inlet flange:ISO100/DN100CF
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 10-6 (108) order
CF (not C version):
CF (C version only):
Rated speed: 48,000
Control unit: SCU-301/451
Edwards STP603 - STP603C turbomolecular pumpPumping speed l s-1:
STP603/STP603C turbomolecular pump
Pumping speed l s-1:
N2: 650
H2: 550
Inlet flange:ISO160F/DN160CF
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 10-7 (10-9) order
CF (not C version): 10-8 (10-10) order
CF (C version only): 6.5 x 10-6 (5 x 10-8)
Rated speed: 35,000
Control unit: SCU-750
Edwards STPxxxx - STPxxxxC turbomolecular pump
STPxxxx/STPxxxxC turbomolecular pump
Pumping speed l s-1:
N2: xxxx
H2: 800
Inlet flange:ISO200F/DN200CF
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 10-7 (10-9) order
CF (not C version): 10-8 (10-10) order
CF (C version only): 6.5 x 10-6 (5 x 10-8)
Rated speed: 35,000
Control unit:SCU-750
Edwards STPH301C turbomolecular pump
STPH301C high performance turbo pump
Pumping speed l s-1:
N2: 300
H2: 200
Inlet flange:ISO100K/DN100CF
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 10-7 (10-9) order
CF (not C version):
CF (C version only):
Rated speed: 48,000
Control unit: SCU-750
Edwards STPH451C turbomolecular pump
STPH451C high performance turbo pump
Pumping speed l s-1:
N2: 450
H2: 300
Inlet flange:ISO160K/DN160CF
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 10-7 (10-9)order
CF (not C version):
CF (C version only):
Rated speed: 48,000
Control unit:SCU-750
Edwards STPA803C turbomolecular pump
STPA803C "advantage" turbo pump
Pumping speed l s-1:
N2: 800
H2: 520
Inlet flange:ISO160F/DN160CF
Ultimate pressure with bake
out heating Pa (Torr):
ISO:  10-7 (10-9) order
CF (not C version):
CF (C version only):
Rated speed: 32,500
Control unit: SCU-750
Edwards STPAxxxxC turbomolecular pump
STPAxxxxC "advantage" turbo pump
Pumping speed l s-1:
N2: xxxx
H2: 800
Inlet flange:ISO200F/DN200CF
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 10-7 (10-9) order
CF (not C version):
CF (C version only):
Rated speed: 32,500
Control unit:SCU-750
Edwards STPAxxxxC turbomolecular pump
STPAxxxxC turbomolecular pump
Pumping speed l s-1:
N2: xxxx
H2: xxxx
Inlet flange:ISO200F/DN200CF
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 10-7
CF (not C version):
CF (C version only):
Rated speed: 36,500
Control unit: SCU-750
Edwards STPAxxxxC turbomolecular pump
STPAxxxxC "advantage" turbo pump
Pumping speed l s-1:
N2: xxxx
H2: xxxx
Inlet flange:ISO250F/ICF305
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 10-6 (10-8)order
CF (not C version):
CF (C version only):
Rated speed: 27,000
Control unit:SCU-xxxx
Edwards STP-XAxxxxC turbomolecular pump
STP-XAxxxxC turbo pump
Pumping speed l s-1:
N2: xxxx
H2: xxxx
Inlet flange:ISO250F/VG250
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 10-7 order
CF (not C version):
CF (C version only):
Rated speed: 27,500
Control unit: SCU-xxxx
Edwards STP-XAxxxxC turbomolecular pump
STP-XAxxxxC turbo pump
Pumping speed l s-1:
N2: xxxx
H2: xxxx
Inlet flange:ISO320F/VG300
Ultimate pressure with bake
out heating Pa (Torr):
ISO: 10-7 order
CF (not C version):
CF (C version only):
Rated speed: 27,500
Control unit: SCU-xxxx
Edwards SCU750 control unit turbomolecular pump Control unit
Magnetic bearing control system: Digital control
Input voltage:
AC100 . 100-120
? 10% V a.c./AC200
200-240 ? 10% V a.c.
Power consumption VAWithout TMS:Max 850
With TMS: Max xxxx
Input frequency Hz: 50/60 ? 2
Leak current mA: Max 3.5
Input phase:
Main breaker rated current A: 10
Motor driving system:Three phase DC brush less motor driver
Allowable ambient temperature ?C:0 . 40
Storage temperature ?C: -25 . 55
Mass kg: 8.5
TMS control unit: Built in
Serial communication function:- 
RS232: Standard
RS485: Standard
Panel display: LCD (20 characters, 2 lines)
Edwards SCU-xxxx control unit turbomolecular pump Control unit
Magnetic bearing control system: Digital control
Input Voltage:200 to 240 ? 10% V a.c.
Power consumption VA
Without TMS: xxxx
With TMS: xxxx
Input frequency Hz: 50/60 ? 2
Leak current mA: Max 3.5
Input phase: Single Phase
Main breaker rated current A: 15
Motor driving system: Three phase DC brush less motor driver
Allowable ambient temperature ?C: 0 to 40
Storage temperature ?C: -25 to 55
Mass kg: 12
TMS control unit: Built in
Serial communication function:
RS232: Standard
RS485: Standard
Vacuum pump sales and service.
VACUUM PUMP PRICES
VACUUM PUMP PRICES
Vacuum pumps and solutions:OIL FREE VACUUM PUMPS:Dry Scroll Pumps: Refurbished Scroll Pumps from Anest Iwata, BOC Edwards and Varian: Anest Iwata ISP Series ISP250B, ISP500B DVSL Series DVSL100B, DVSL500B BOC Edwards XDS Series XDS5/5C, XDS10/10C, XDS35i ESDP Series ESDP12-30 GVSP Series XDD1 Varian SH100, PTSxxxxX, PTSxxxxX
Service & Repair of turbo vacuum pumps and controllers including:Bearing changes, Regreasing, Cleaning, Repair and Balancing.
Vacuum Pump Sales & Service for Alcatel Adixen,Pfeiffer,Balzers,Oerlikon Leybold,Varian,Rigaku,Boc Edwards,Seiko Seiki,Balzers.
Standard major repair includes complete disassembly,decontamination,chemical clean, inspection of all components,bake out all parts prior to assembly,install major kit (bearings,hardware,seals),leak check,dynamic balancing and integrity test for 24 hours to insure operational specifications are met.Any damage to the rotor,discs,shaft,motor or other major parts not covered inthe major rebuild will need customer approval before work is done.
- We combine state of the art balancing and FFT diagnostic equipment, 25 years in repairing machinery, and 15 years of applied high vacuum techniques to ensure proper repair of your turbomolecular pump.
- Highest quality replacement parts, such as permanently lubricated ceramic bearings, are used in all repairs.
- Most repairs are completed within 15 days. Emergency repair service with a 3-5 day turnaround is available.
- Repairs are competitively priced. Discounts for universities are available.
Oerlikon Leybold
Most Oerlikon Leybold Turbovac TMP models produce a clean, hydrocarbon free vacuum at an ultimate pressure of <10-10 mbar. Other features of the TMP models include grease lubricated bearings that permit the pump to operate in any desired angular position, while retaining the advantages of single axial flow construction; dynamic balancing of the pump's replaceable rotor/spindle assembly produces silent running with minimal vibration; the turbine and drive assembly with internal motor are mounted in a stainless steel housing; the pump motor is protected from overheating by a thermal switch, which turns off the pump's frequency converter if the pump motor exceeds its safe operating temperature limit; a heat treated aluminum alloy is used for the rotor assembly; the complete drive assembly including bearings and motor is located in the fore vacuum space.For use in:Helium leak detectors, Mass spectrometers,liquid chromatography,residual gas analysis,mobile analytical systems,Electron beam microscopy,XHV-/UHV systems,Transfer chambers, Semiconductor Technology, Analytical and Medical Technology, Coating, Research and Development, Industrial Applications, Products and Applications
Turbomolecular vacuum pump repair, sales and service.
Turbo vacuum pumps we repair:
Alcatel: xxxx, xxxx, xxxx, xxxx, xxxx ATP series:ATP 80,ATP 100,ATP 150,ATP 400,ATP 900 MDP series:MDP xxxx,MDP xxxx,MDP xxxx
Balzers/Pfeiffer: TPH/U:TPH/U 040,TPH/U 050,TPH/U 060,TPH/U 062,TPH/U 100,TPH/U 110,TPH/U 170,TPH/U 180H,TPH/U 190,TPH/U 200,TPH/U 240,TPH/U 260,TPH/U 270,TPH/U 330,TPH/U 510,TPH/U xxxx TMU/H:TPH/U 064,TPH/U 065,TPH/U 071,TPH/U 261,TPH/U 521
Edwards: EXT70, EXT 250, EXT 351, EXT 501, EXT 501E
Leybold: Turbovac/TMP 50, TMP 150,TMP 151,TMP 360,TMP 361,TMP 450,TMP xxxx,TMP xxxx
Rigaku: RTPG 150, RTP 300
Varian: Elettrorava V80, V80A, V200, V200A, V300, V450, Vxxxx, VxxxxA, MacroTorr series: V70, V250, V300HT, V550, V551, V700, VxxxxHT, SCIEX V801
Vacuum Pump Sales and Service.
- SERVICE & REPAIRS of High Vacuum Pumps ,Turbo pumps and controllers (frequency converters),High Vacuum Pumps: ion,turbo,diffusion,cryo,mechanical,dry,scroll,rotary vane,mechanical boosters & Leak Detectors.
- Supplier of RECONDITIONED (Rebuilt, Refurbished) High vacuum pumps: wet, dry, scroll, rotary, diffusion, mechanical booster, turbo molecular, ion, cryo.  
- We Buy vacuum pumps,turbo pumps, ion pumps, cryo pumps, diffusion pumps, vane pumps, oil free pumps, dry pumps, mechanical vacuum pumps and Leak Detectors.
- We Sell rebuilt (refurbished) Vacuum Pumps and Leak Detectors.
We  Sell Vacuum Pumps and offer Vacuum Pump Service!
High Vacuum Pumps for Sale!
SEIKO SEIKI TURBOMOLECULAR PUMPS
SEIKO SEIKI TURBOMOLECULAR PUMPS PRICE,SALES AND SERVICE.
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State: New York  City: Buffalo  Category: Business
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